• Manufactured by BEMCO in 1996.
• Re-Conditioned and Modified by Gavula Engineering in 2012.
• Features Liquid Nitrogen Gas Shroud with 3 zones.
• Includes fabrication of Shroud Feedthru’s making the Shroud Removable.
• Chamber and Shroud have been Helium Leak Tested Good.
• Slide out stainless steel shelf inside of shroud.
• Independent platen control zone.
• Fabricated and installed new heavy duty Chamber Door Pin Hinge.
• Replaced 10” ASA Port Flange with New ISO 320, 12” Port Flange.
• Installed New ISO 320 Stainless Steel VAT Gate Valve.
• Fabricated and installed ISO 320 X ASA adapter flange collar for CTI On Board 10 Cryopump.
• Installed Re-Conditioned CTI On-Board 10 Cryopump with New CTI Model 9600 Cryo-Compressor and Helium Hoses.
• New Anest-Iwata 500C Scroll Pump (21 CFM) for Chamber Roughing and Cryopump regeneration.
• New Bellows Type Roughing and Vent Valves, 24vdc actuated.
• New NEMA enclosure vacuum control electrical panel with Allen-Bradley PLC, motor starters, relays, fuses, built by UL listed Panel Shop.
• Chamber has been pumped down to 2E -7 Torr.

As is price = $260,000

Work needed to complete:

• Install quartz lamps in shroud area for high temperature testing.
• Provide new UL listed electrical panel used for thermal control using a Watlow F4T controller with 3 control circuits (Shroud cooling, Quartz Lamps Heating and Thermal plate Heat/Cool). Includes qty. 4, Watlow over/under temperature failsafe controllers.
• Install new Liquid Nitrogen solenoid valves.
• Provide new Computer for SCDA
• Program PLC.

Estimated completion Costs = $62,000